Table 1. Capacitance density and AlO
x
thickness as the anodizing voltage increases
Anodizing voltage (V)
Capacitance density (nF/cm
2
)
AIO
x
thinkness (nm)
2 V
1,711.6
4.7
3 V
1,436.6
5.5
4 V
1,234.5
6.5